The growing miniaturization and output density of semiconductor components is resulting in increasingly high requirements for the cleanliness of starting materials. As well as reducing the efficiency of the components, the tiniest traces of foreign elements can significantly shorten their service life. The VPD systems from PVA TePla allow our customers to detect these trace elements before and during the process chain on the wafer with detection limits of up to 1E7 at/cm². As a result, disruptions to production can be identified at an early stage and unnecessary additional costs can be avoided. This means that PVA TePla systems pay for themselves quickly.
How can we help you?
With VPD technology, the surface of the substrate material is broken down in the gaseous phase and the reaction products are discharged. Usually, the contamination previously present in the removed material is not transferred to the gaseous phase and remains on the surface. In the subsequent step, a fluid is dripped over the surface, where it gathers up the remaining impurities. The content of the drops can be analyzed by an ICP-MS or a TXRF, for example.
Advantages:
The modular concept is based on modules for various applications and all common wafer sizes. Modules are available for etching the backing layer on the wafer (PAD Fume), for scanning the wafer with the VPD drops to gather the contamination (PAD Scan) and for driving out the fluid of the scan solution for the TXRF analysis (PAD Dry). The latter can also be used to drive out disruptive compounds before scanning or traces of moisture before evacuating the wafer.
There are numerous options for configuring these modules. Here are some examples:
The WSPS system maps the entire VPD process chain in which the processes or modules in a compact system housing fitted with FFU units are supplemented by the corresponding infrastructure.
Advantages at a glance:
The WSMS system constitutes an enhancement of the WSPS series and combines VPD technology with the outstanding detection limits of the WSPS series with a fully integrated ICP-MS.
Advantages at a glance:
PVA TePla Singapore Pte. Ltd.
12 New Industrial Road, #05-03
Morningstar Centre
Singapore, 536202
Telephone: +65 9631 4005
E-Mail: sales-sg(at)pvatepla.com
Web: www.pvatepla-singapore.com